-
Wafer
production lines
(08) for mono-crystalline
silicon wafers
with wafer
-
Nassbank
Rena wafer
unloader Rena
WTS
-
wafer
printing system
Baccini
Rotary
-
PECVD
system OTB
DEPX1000
(08)
-
wafer
edge isolation
laser
OTB
-
furnaces
Centrotherm DO
FF HTO
(08)
-
bearing
Paternoster Hänel
Lean-Lift
-
process
analysis system
Metrohm 875 (08)
-
wafer
inspection
stations
-
precision scales
-
laboratory
cabinets
-
Atlas
Copco
ZR160VSDFF
(08)
-
vacuum station
Pfeiffer
WS6000
with pump
stations
and
cooling
water circuit
-
KOH
-
potassium
hydroxide
-
supply station
Faeth
(08)
-
hydrogen
supply station
Faeth
(08)
-
2
cast resin
TMC
1,600
kVA
(08)
-
complete
fresh
water
treatment
plant
-
neutralization
unit
(08)
-
chamber
filter press
Filoxenes
(08)
-
IPC
-
isopropanol
-
supply
unit
Faeth
(09)
-
screen
wash
hundredweight
PC100
-
complete
exhaust gas
cleaning system
Steuler
(08)
-
5
chillers
carrier
30XA0452/30XA0702
(08)
-
nitrogen
and argon
supply system,
including tanks
and
evaporators
-
Pfeiffer
Vacuum Station with pump
stations WS6000
and cooling
water circuit
